Mo-1 / TZM ≥99.95% · Rotary & planar · ASTM B386

Molybdenum Sputtering Target

Molybdenum sputtering targets for electrode and wiring materials in flat-panel displays, thin-film solar cells and barrier layers in semiconductors — built on molybdenum's high melting point, high conductivity, low resistivity and good corrosion resistance. Available as rotary and planar targets in pure Mo (Mo-1) and TZM, with tight grain size, roughness and flatness control. All sizes custom to your drawing.

Mo-1 / TZM ≥99.95%Rotary & planarRa ≤0.4 µm · flatness <4 µmASTM B386

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Gallery

Molybdenum Sputtering Target photos

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Specifications

Sizes & technical data

Manufacturing range

Type	Dimensions (mm)
Rotary target (OD × ID × L)	Φ140 – 180 × Φ125 – 135 × 100 – 3300
Planar — rectangular (L × W × T)	10 – 3000 × 10 – 800 × 1.0 – 50.8
Planar — round (Ø × T)	Ø10 – 1000 × 1.0 – 100

Key parameters

Composition	Molybdenum (Mo-1 · TZM)
Purity	≥ 99.95%
Density	10.2 g/cm³
Grain size	≤ 100 µm² (or to requirement)
Roughness	Ra ≤ 0.4 µm
Flatness tolerance	< 4 µm
Standard	ASTM B386

Physical & chemical properties

Atomic number	42
CAS number	7439-98-7
Atomic mass	95.94 g/mol
Melting point	2620 °C
Boiling point	4639 °C
Density (20 °C)	10.22 g/cm³
Crystal structure	Body-centered cubic
Thermal expansion (20 °C)	5.2 × 10⁻⁶ m/(m·K)
Thermal conductivity (20 °C)	142 W/(m·K)
Specific heat (20 °C)	0.25 J/(g·K)
Electrical conductivity (20 °C)	17.9 × 10⁶ S/m
Resistivity (20 °C)	0.056 (Ω·mm²)/m

Production process

How it is made

Powder blending

Mo powder mixed to grade.

Isostatic press

Cold isostatic pressing.

Sintering

Medium-frequency sintering furnace.

Machining & finishing

Machined and finished to roughness / flatness spec.

Applications

Where molybdenum sputtering target is used

Flat-panel displays

Electrode and wiring material for FPD and TFT-LCD.

Thin-film solar cells

Back-contact and electrode layers for thin-film PV.

Semiconductors

Barrier-layer material for semiconductor devices.

Functional coatings

Targets for sensors, FED and functional thin films.

Need a custom molybdenum sputtering target?

Send your target type (rotary / planar), dimensions and grade (Mo / TZM) — or a drawing. Quotes within one business day.

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